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  • ing solutionsUS695800113 Dec 200425 Oct 2005Micron Technology, Inc.Carrier assemblies, planarizing apparatuses including carrier assemblies, and methods for planarizing micro-device workpiecesUS696930619 Aug 200429 Nov 2005Micron Technology, Inc.Apparatus for planarizing microelectronic workpiecesUS6976902 *21 May 200420 Dec 2005Samsung Electronics Co., Ltd.Chemical mechanical polishing apparatusU
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