Description
Metadata
Settings
owl:sameAs
Inference Rule:
b3s
b3sifp
facets
http://www.w3.org/2002/07/owl#
ldp
oplweb
skos-trans
virtrdf-label
None
About:
isa:254548601
Sponge
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An Entity of Type :
prov:Entity
, within Data Space :
webisadb.webdatacommons.org
associated with source
dataset(s)
Type:
prov:Entity
New Facets Session with This Class
Attributes
Values
rdf:type
prov:Entity
prov:value
Substrates, such as semiconductor wafers or flat panel displays, are typically moved from one processing station to the next using robotic transfer arms. The newest type of arm is an edge grip arm, which grips only the leading and trailing edges
prov:wasQuotedFrom
docstoc.com
is
prov:wasDerivedFrom
of
isap:319890082
isap:337963165
Alternative Linked Data Views:
ODE
Raw Data in:
CXML
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| RDF (
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N3/Turtle
JSON
XML
) | OData (
Atom
JSON
) | Microdata (
JSON
HTML
) |
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