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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • , 2005Micron Technology, Inc.Carrier assemblies, planarizing apparatuses including carrier assemblies, and methods for planarizing micro-device workpiecesUS6935929Apr 28, 2003Aug 30, 2005Micron Technology, Inc.Polishing machines including under-pads and methods for mechanical and/or chemical-mechanical polishing of microfeature workpiecesUS6958001Dec 13, 2004Oct 25, 2005Micron Technology, Inc.Carr
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