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  • 5Micron Technology, Inc.Carrier assemblies, planarizing apparatuses including carrier assemblies, and methods for planarizing micro-device workpiecesUS6922253Jul 15, 2003Jul 26, 2005Micron Technology, Inc.Planarizing machines and control systems for mechanical and/or chemical-mechanical planarization of microelectronic substratesUS6932687Feb 5, 2004Aug 23, 2005Micron Technology, Inc.Planarizing pa
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