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  • 5, 2006Micron Technology, Inc.Carrier assemblies, polishing machines including carrier assemblies, and methods for polishing micro-device workpiecesUS7037179May 9, 2002May 2, 2006Micron Technology, Inc.Methods and apparatuses for making and using planarizing pads for mechanical and chemical-mechanical planarization of microelectronic substratesUS7070478Aug 31, 2004Jul 4, 2006Micron Technology, Inc
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