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  • Similar to the bottom and top conductive plates 20, 22 of the MIM capacitor 18 (FIG. 5), the thin film resistor 68 may be composed of a body of a refractory metal, such as TiN, TaN, Ta, W, WN, ternary materials like TiSiN, TaSiN, and WSiN, multi-layered combinations of these materials such as either W or Ta clad below and above with either TiN or TaN, and other like materials.
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