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  • Second-level contact plugs 24 a and 24 b made of conductive material such as W are buried in the small diameter second-level contact holes 22A and 22B. The second-level contact plugs 24 a and 24 b are formed by a method similar to that described with FIG. 5 and has the same structure as that of the contact plug 18 a shown in FIG. 5.
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