FIG. 45 is illustrative of a case in which the adhesive having high fluidity is commonly used as the adhesive 200 for gluing the fixation section 22, the movable section 20, and the thin plate sections 16 a, 16 b, especially depicting an example which is provided with projections 282 am, 282 an, 282 bm, 282 bn for comparting regions for forming the adhesive 200 on the thin plate sections 16 a, 16