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  • iews of an example of wiring for applying a voltage to a cathode member and an anode member of the polishing ring wheel of a polishing apparatus according to the 11th embodiment, where FIG. 20A is a plan view and [0173]FIG. 20B is a sectional view; [0174]FIGS. 21A to 21C are views of an example of the layout of a cathode member and an anode member of the polishing ring wheel according to the 11th
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