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  • The embedded polysilicon thermal resistor in the bimorph mesh acts as the heat source to actuate the hinge of the mirror and the relation between the actuation angle ?? and the external voltage V can be approximated as: ??=k(E 1 ,E 2 ,t 1 ,t 2)L??????T???V 2 Equation (1) [0058] where k is a coefficient related to the Young's modulus E and the thickness t of the two layers.
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