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  • In addition, those different types of power generators or batteries may be combined in the sensor chip. [0135] For example, the sensor chip of the present invention may be configured as a hybrid one so that the MEMS variable capacitor type power generator shown in FIG. 1 is combined with a button battery shown in FIGS. 24G and 24H so that the power from the MEMS variable capacitor type power gener
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