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  • n Technology, Inc.Method for planarizing microelectronic workpiecesUS7131891Apr 28, 2003Nov 7, 2006Micron Technology, Inc.Systems and methods for mechanical and/or chemical-mechanical polishing of microfeature workpiecesUS7147543Jul 28, 2005Dec 12, 2006Micron Technology, Inc.Carrier assemblies, planarizing apparatuses including carrier assemblies, and methods for planarizing micro-device workpiece
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