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  • Inc.Method and apparatus for increasing chemical-mechanical-polishing selectivityUS6893332Aug 30, 2004May 17, 2005Micron Technology, Inc.Carrier assemblies, planarizing apparatuses including carrier assemblies, and methods for planarizing micro-device workpiecesUS6922253Jul 15, 2003Jul 26, 2005Micron Technology, Inc.Planarizing machines and control systems for mechanical and/or chemical-mechanica
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