About: isa:265090023   Sponge Permalink

An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

AttributesValues
rdf:type
prov:value
  • Inc.Carrier assemblies, polishing machines including carrier assemblies, and methods for polishing micro-device workpiecesUS7086927Mar 9, 2004Aug 8, 2006Micron Technology, Inc.Methods and systems for planarizing workpieces, e.g., microelectronic workpiecesUS7094695Aug 21, 2002Aug 22, 2006Micron Technology, Inc.Apparatus and method for conditioning a polishing pad used for mechanical and/or chemica
prov:wasQuotedFrom
is prov:wasDerivedFrom of
Alternative Linked Data Views: ODE     Raw Data in: CXML | CSV | RDF ( N-Triples N3/Turtle JSON XML ) | OData ( Atom JSON ) | Microdata ( JSON HTML) | JSON-LD    About   
This material is Open Knowledge   W3C Semantic Web Technology [RDF Data] Valid XHTML + RDFa
OpenLink Virtuoso version 07.20.3217, on Linux (x86_64-pc-linux-gnu), Standard Edition
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2012 OpenLink Software