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  • Incidentally, as a method for manufacturing the joining members in an inverted taper manner, a metal film having the same dimension as the movable diaphragm is formed as an etching stop layer, and the joining members can be formed by over etching by using a dry etching process. [0145] In FIG. 13A, energy such as electrical energy is not applied to the heat generating member 502, so that heat is ge
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