FIG. 11A is a plan view depicting an example of the illumination system measuring device 63, FIG. 11B is a cross-sectional view thereof when viewed from the front face, and as FIG. 11A and FIG. 11B show, a glass substrate 64, which transmits the exposure light, is installed so as to cover the opening of the top face of the box-shaped main body section of the illumination system measuring device 63