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  • nium compound of the formula (I) ##STR1## wherein R is a hydrogen atom, a lower alkyl group, a C8-13 condensed polycyclic hydrocarbonyl...http://www.google.fr/patents/US5312774?utm_source=gb-gplus-shareBrevet US5312774 - Method for manufacturing a semiconductor device comprising titanium Recherche avanc???e dans les brevets Num???ro de publicationUS5312774 AType de publicationOctroi Num???ro de de
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