ings, lithography tools including such optical gratings and methods for using same for alignmentUS763526323 Mar 200722 Dic 2009Molecular Imprints, Inc.Chucking system comprising an array of fluid chambersUS763699931 Ene 200529 Dic 2009Molecular Imprints, Inc.Method of retaining a substrate to a wafer chuckUS766598125 Ago 200523 Feb 2010Molecular Imprints, Inc.System to transfer a template transfer