prov:value
| - In this embodiment, the case that combination of ceramics and metal namely Al2O3 for the first thin film and Al for the second thin film is described, however, alternatively, combinations, for example, a combination of a metal and a ceramic such as Al and Al2O3, a combination of a metal and another metal such as Ta and Al, or, Al and Cu, and a combination of two kinds of ceramics such as alumina a
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