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  • Further, the semi-hardened state is a state where the resin 2 can be deformed by pressure and is adhesive. [0049] Meanwhile, as FIG. 2b shows, the first substrate 1 a is placed on a flat plate which is capable of heating such as a hot plate 6 and is capable of vacuum sucking, and on the substrate 1 a, spacers 3 are dispersed.
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