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  • R13 is an acid labile group, R14, R15 and R16 are, each independently, a hydrogen atom, fluorine atom, or a straight, branched or cyclic alkyl group of 1 to 10 carbon atoms, which are, each independently, optionally substituted with fluorine, R17 is a hydrogen atom, fluorine atom, or a straight, branched or cyclic alkyl group of 1 to 10 carbon atoms, which is optionally substituted with fluorine,
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