BRIEF DESCRIPTION OF THE DRAWINGS [0020]FIG. 1 is a cross sectional view of a substrate having a recess in a surface layer thereof, a plated underlayer formed on the whole surface including the recess, and a plated film formed on the whole surface. [0021]FIGS. 2A and 2B are a plan view of the substrate having metal left only in the recess and a flat whole surface including the metal surface, and a