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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • where ?? is a dielectric constant of an insulating layer between two conductive elements, i.e., a gate line and a storage capacitor metal layer, ???d??? is a width of the insulating layer, and S is an area of an overlap region between the gate line and the storage capacitor metal layer.
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