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  • G. 4 is a partial sectional view showing one modified example of the probe card shown in FIG. 3. [0022]FIGS. 5A and 5B are drawings showing a part of the probe for explaining another modified example of the probe card shown in FIG. 3. [0023]FIGS. 6A and 6B are a plan view and a sectional view taken along line A-A for explaining a method of inspecting semiconductor devices according to one embodime
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