Description
Metadata
Settings
owl:sameAs
Inference Rule:
b3s
b3sifp
facets
http://www.w3.org/2002/07/owl#
ldp
oplweb
skos-trans
virtrdf-label
None
About:
isa:278300267
Sponge
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An Entity of Type :
prov:Entity
, within Data Space :
webisadb.webdatacommons.org
associated with source
dataset(s)
Type:
prov:Entity
New Facets Session with This Class
Attributes
Values
rdf:type
prov:Entity
prov:value
According to the aforementioned arrangement, the gas such as moisture generated from the interlayer insulating film due to heat application in the manufacturing process of the semiconductor device is discharged to outside through the slit
prov:wasQuotedFrom
docstoc.com
is
prov:wasDerivedFrom
of
isap:349946391
Alternative Linked Data Views:
ODE
Raw Data in:
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N3/Turtle
JSON
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) | OData (
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JSON
) | Microdata (
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