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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • For example, the first and second word lines 20 and 30 may be formed of a conductive metal layer having excellent conductivity, such as gold, silver, copper, aluminum, tungsten, tungsten silicide, titanium, titanium nitride, tantalum, or tantalum silicide.
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