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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • The angular accelerometer includes a substrate, a fixed electrode supported on the substrate and including a first plurality of fixed capacitive plates, and a rotational inertia mass suspended over a cavity and including a plurality of movable capacitive plates arranged to provide a capacitive coupling with the first plurality of fixed capacitive plates.
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