Metals including Cu, Ta, Ti, and oxides such as TiO2, ZnO, InSnO, ZrO2 have been deposited using HIPIMS. Also, anti-corrosion coatings of TiN, CrN/NbN and CrAlYN/CrN and CNx hard coatings have been made by HIPIMS. Ion Plating Ion plating uses energetic ion bombardment during deposition to densify the deposit and control properties of the coating such as stress and microstructure.