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  • The MEM device 10 in the example of FIG. 1 is built up of five layers of structural polysilicon on a substrate 12 (preferably silicon) using many individual reticles for defining the various mechanical members (e.g. gears and hubs and other elements not shown in FIG. 1 such as electrostatic motors, linkages, levers, actuators, guides, stops etc.) of the device.
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