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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • Specific embodiments may include one or more of the following features: the substrate may be made from a plain silicon wafer, a silicon wafer with a nanoengineered surface, a permanent magnet, a polymer such as polycarbonate or polystyrene, a nylon membrane, gold, or other sheet material with a thickness of, for example, 500 to 1 micron.
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