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  • As in FIGS. 1A and 1B, a vacuum pump 16 is also preferably provided in fluid communication with one or more outlets of the SMIF pods for removing the gaseous working fluid or purge gas, and any particle contaminants, other types of vaporous contaminants such as from the manufacturing processes, oxygen, and humidity entrained in the gaseous working fluid or purge gas from the SMIF pod.
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