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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • Preferably, the component measured at the detector 3 has at least one parameter such as energy, wavelength, bandwidth, spatial or temporal beam profile, divergence, spatial or temporal coherence, etc. that it is desired to be measured that has a known relationship to the same parameter in the other component that is used for processing the workpiece.
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