About: isa:294642851   Sponge Permalink

An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

AttributesValues
rdf:type
prov:value
  • rface area) electrode from Ti and TiN, capacitors and semiconductor devices including sameUS6613240Dec 1, 2000Sep 2, 2003Epion CorporationMethod and apparatus for smoothing thin conductive films by gas cluster ion beamUS6617250Sep 13, 2002Sep 9, 2003Micron Technology, Inc.Methods of depositing a layer comprising tungsten and methods of forming a transistor gate lineUS6649466Sep 13, 2002Nov 18, 200
prov:wasQuotedFrom
is prov:wasDerivedFrom of
Alternative Linked Data Views: ODE     Raw Data in: CXML | CSV | RDF ( N-Triples N3/Turtle JSON XML ) | OData ( Atom JSON ) | Microdata ( JSON HTML) | JSON-LD    About   
This material is Open Knowledge   W3C Semantic Web Technology [RDF Data] Valid XHTML + RDFa
OpenLink Virtuoso version 07.20.3217, on Linux (x86_64-pc-linux-gnu), Standard Edition
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2012 OpenLink Software