region 221 doped one type of conductivity impurities through the first conductive layer 215 is formed in self-aligning manner using the sides pacer 220 and the second conductive layer 218 as a mask during the doping process. (FIG. 11D)As impurities of the one type of conductivity, an element such as phosphorous or arsenic, belonging to Group 15 in the periodic table, is used in the case of an n-t