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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • An apparatus comprising: an interconnect including a conductive material extending into a dielectric material layer; a capping layer proximate said interconnect; and a sealing structure adapted to seal at least one gap of exposed interconnect conductive material between said capping layer and said dielectric layer. 12.
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