prov:value
| - Examples of the high-resistance material are an insulating material including an oxide (e.g., alumina (Al2O3-X), magnesium oxide (MgO), SiO2, or Si???O???N, Ta???O, Al???Zr???O), nitride, or fluoride containing at least one element selected from the group consisting of aluminum (Al), titanium (Ti), tantalum (Ta), cobalt (Co), nickel (Ni), silicon (Si), magnesium (Mg), and iron (Fe) and a semicondu
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