About: isa:302839944   Sponge Permalink

An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

AttributesValues
rdf:type
prov:value
  • This is accomplished by integrating the process of forming a copper seed layer in an interconnect structure such as a trench or a groove, with the process of plasma cleaning of the...http://www.google.es/patents/US6395642?utm_source=gb-gplus-sharePatente US6395642 - Semiconductor substrate B???squeda avanzada de patentes N???mero de publicaci???nUS6395642 B1Tipo de publicaci???nConcesi???n N???mer
prov:wasQuotedFrom
is prov:wasDerivedFrom of
Alternative Linked Data Views: ODE     Raw Data in: CXML | CSV | RDF ( N-Triples N3/Turtle JSON XML ) | OData ( Atom JSON ) | Microdata ( JSON HTML) | JSON-LD    About   
This material is Open Knowledge   W3C Semantic Web Technology [RDF Data] Valid XHTML + RDFa
OpenLink Virtuoso version 07.20.3217, on Linux (x86_64-pc-linux-gnu), Standard Edition
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2012 OpenLink Software