prov:value
| - The depositions of the various materials and layers in the formation of a MEM switch capacitor array may be formed of suitable conductive materials, such as copper, aluminum, gold, silver, as metals or as inks to be fired, applied by suitable processes, such as sputtering, vacuum deposition, plating, electroplating, thin-film techniques, and the like, with or without the use of seed layers of tita
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