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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • When the substrate to be treated is a solid molded article such as a plastic container, on the other hand, the interior and/or the exterior of the plastic container is maintained in a reduced pressure atmosphere containing the treatment gas, and the microwave discharge is generated inside and/or outside of the container, so that the film is formed on the inner surface and/or the outer surface of t
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