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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • The surface can comprise, for example, a metal such as copper, aluminum, platinum, titanium, silver, tungsten and/or tantalum, a dielectric such as silica, borophosphosilicate glass (BPSG), borosilicate glass (BSG), or phosphosilicate glass, carbon-doped silica, porous silica, and/or a low k dielectric such as silicon dioxide deposited by plasma enhanced chemical vapor deposition (PECVD), a spin-c
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