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  • The alloy may comprise more than two elemental components. [0049] The term ???feature??? refers to contacts, vias, trenches, and other structures which make up the topography of the substrate surface. [0050] The term ???ion-deposition plasma sputtered??? and the term ???ion metal plasma (IMP) refer to sputter deposition, preferably magnetron sputter deposition, where a high density, inductively co
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