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  • The residual gas analyzer 608 is connected to the controller 600 which may process and analyze measurements from the residual gas analyzer 608 to generate control singles to the RF plasma bias power 305A, the RF plasma source powers 171A/172A, the gas panels 130A/130B, the pump 40, or any other controllable components of the plasma chamber 1 to adjust process parameters, for example pressure, powe
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