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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • The substrate with a heat generating element 15 comprises a protection layer 16-1 made of silicon oxide, silicon nitride or silicon carbide, an outermost protection layer 16-2 made of a metal such as platinum or metal oxide thereof, preferably made of tantalum or oxide of tantalum, electrodes 17-1 and 17-2 made of aluminum, gold or aluminum???copper alloy, a heat generating resistor layer 18 made
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