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  • This insulating layer 248 can be formed of an inorganic insulating material such as silicon oxide, silicon nitride, silicon oxynitride, aluminum oxide, aluminum nitride, or aluminum oxynitride; acrylic acid, methacryl acid, or a derivative of these; heat-resistant polymer such as polyimide, aromatic polyamide, or polybenzimidazole; or, among the compound made of silicon, oxygen, and hydrogen forme
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