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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • The material of the insulating film 13 preferably exhibits a sheet resistance of at least 1???1012 ??/???, and includes, for example, silicon oxide, silicon nitride, silicon oxynitride, spin-on glass, a silicon-based insulating film such as a blank material used in the manufacture of a mask, and resins such as quinone diazide-novolak resin, polystyrene, polysulfone, polyamide, polyimide, polymethy
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