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  • Then, if the washing nozzle 51 is moved to reach a predetermined position on the side of the table 29 after completion of the discharge of the washing solution against the entire region of the groove portion 41, the position of the washing nozzle 51 is moved at a predetermined speed toward the tip portions of the chucks 28 a to 28 c while discharging a drying gas such as a nitrogen gas from the dr
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