These heaters 302 and 310 heat the solvent in order to promote activation of the solvent. [0175] The jointing area of the stage 301 and the head 309 may be exposed to the air, but is preferably maintained in an inert gas such as an N2 or Ar gas. [0176] Further, an ultrasonic generator may be connected at least to the stage 301 or the head 309 in order to improve the joint between the first and sec