About: isa:306334770   Sponge Permalink

An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

AttributesValues
rdf:type
prov:value
  • The openings 36, 38 and 40 are then filled with a conductive material, i.e. doped polysilicon or tungsten, and then planarized back to the surface 42 of the insulating material layer 34. [0048] As shown in FIG. 3, a diffusion barrier/fuse/resistor material of a refractory metal-silicon-nitrogen is then deposited and patterned into a diffusion barrier 44, a fuse 46 and a high resistance resistor 48
prov:wasQuotedFrom
is prov:wasDerivedFrom of
Alternative Linked Data Views: ODE     Raw Data in: CXML | CSV | RDF ( N-Triples N3/Turtle JSON XML ) | OData ( Atom JSON ) | Microdata ( JSON HTML) | JSON-LD    About   
This material is Open Knowledge   W3C Semantic Web Technology [RDF Data] Valid XHTML + RDFa
OpenLink Virtuoso version 07.20.3217, on Linux (x86_64-pc-linux-gnu), Standard Edition
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2012 OpenLink Software