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  • The movable electrode 14 serves, for example, as a part of a signal line in the high-frequency circuit.The anchor portions 15a and 15b are formed of a conductive material such as gold (Au), aluminum (Al), or copper (Cu) and formed on upper faces of parts of branch lines 17a and 17b in an extending direction thereof in such a manner to support themovable electrode 14 at both ends thereof.The first
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