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  • This also applies to the description of variable capacitors of other embodiments which will be described later.The driving electrodes 21a and 21b are formed of a conductive material such as gold (Au), aluminum (Al), or copper (Cu), and formed on a surface of a substrate 11 with the fixed electrode 12 interposed therebetween, i.e., provided individuallyadjacent to two sides of the fixed electrode 1
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